New Aluminosilicate Materials with Hierarchical Porosity Generated by Aerosol Process

Closed porosity aluminosilicate for electronic packaging applications

The electrical properties of sol-gel prepared aluminosilicate films were investigated for suitability in electronic applications. The aluminosilicate films exhibited apparent closed porosity and a dielectric constant as low as = 5 with processing temperatures from 373 K to 873 K. The porosity was inaccessible to nitrogen at 77 K, helium at 293 K, and water vapor at 293 K. Both bulk and thin-fil...

Immobilization of Methyltrioxorhenium on Mesoporous Aluminosilicate Materials

The presented report focuses on an in-depth detailed characterization of immobilized methyltrioxorhenium (MTO), giving catalysts with a wide spectra of utilization. The range of mesoporous materials with different SiO₂/Al₂O₃ ratios, namely mesoporous alumina (MA), aluminosilicates type Siral (with Al content 60%-90%) and MCM-41, were used as supports for immobilization of MTO. The tested suppor...

Porosity of Low-κ Materials Studied by Slow Positron Beam

Until the past few years, aluminium was used in semiconductor technology as interconnect metal and silicon dioxide (SiO2, κ = 3.9) as the interand intra-level insulator. With the demand of scaling the dimension of advanced integrated circuits well below the 100 nm DRAM 1/2 pitch technology node [1], the signal delay (resistance–capacitance RC delay) becomes one limitation in increasing the spee...

Preparation and Electrochemical Properties of Cathode and Anode Materials for Lithium Ion Battery by Aerosol Process

Solving New Product Selection Problem by a New Hierarchical Group Decision-making Approach with Hesitant Fuzzy Setting

Selecting the most suitable alternative under uncertainty is considered as a critical decision-making problem that affects the success of organizations. In the selection process, there are a number of assessment criteria, considered by a group of decision makers, which often could be established in a multi-level hierarchy structure. The aim of this paper is to introduce a new hierarchical multi...